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Derniers dépôts
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Thibaut Meyer, Aurélie Girard, Christophe Cardinaud, Marek Bouška, Emeline Baudet, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH 4 -H 2 -Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), May 2023, Kyoto, Japan. ⟨hal-04675793⟩
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T Meyer, A Girard, M Bouska, E Baudet, M Baillieul, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH4-H2-Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), Takayuki Watanabe - Kyushu University; Satoshi Hamaguchi - Osaka University, May 2023, Kyoto, Japan. ⟨hal-04675788⟩
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S Chouteau, A Durocher-Jean, A Granier, M Richard-Plouet, L Stafford. Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy. Plasma Sources Science and Technology, 2024, 33 (7), pp.075016. ⟨10.1088/1361-6595/ad5d11⟩. ⟨hal-04672943⟩
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Simon Chouteau, L. Stafford, Agnès Granier, Antoine Goullet, Mireille Richard-Plouet. Handling Nanoparticle Content in Nanocomposite Thin Films Deposited by Misty Plasma Processes through Controlled Flash Boiling Atomization. Langmuir, 2024, 40 (6), pp.3015-3023. ⟨10.1021/acs.langmuir.3c03176⟩. ⟨hal-04549282⟩
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Issraa Shahine, Quentin Hatte, Maxime Harnois, Pierre-Yves Tessier. Large Area Freestanding Au Nanoporous Ultrathin Films Transfer Printed on Bendable Substrates and 3D Surfaces for Flexible Electronics. ACS Applied Electronic Materials, 2024, 6 (4), pp.2281-2288. ⟨10.1021/acsaelm.3c01771⟩. ⟨hal-04552765⟩
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Pascal Bargiela, Vincent Fernandez, Christophe Cardinaud, John Walton, Mark Greiner, et al.. Towards a reliable assessment of charging effects during surface analysis: Accurate spectral shapes of ZrO2 and Pd/ZrO2 via X-ray Photoelectron Spectroscopy. Applied Surface Science, 2021, 566, pp.150728. ⟨10.1016/j.apsusc.2021.150728⟩. ⟨hal-03355769⟩
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Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, et al.. Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors. Journal of Vacuum Science & Technology A, 2024, 42 (2), pp.023405. ⟨10.1116/5.0177028⟩. ⟨hal-04423908⟩
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Michael Rodriguez-Fano, Mohamad Haydoura, Julien Tranchant, Etienne Janod, Benoît Corraze, et al.. Enhancing the Resistive Memory Window through Band Gap Tuning in Solid Solution (Cr1–xVx)2O3. ACS Applied Materials & Interfaces, 2023, 15 (47), pp.54611-54621. ⟨10.1021/acsami.3c09387⟩. ⟨hal-04361024⟩
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J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, et al.. Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge. Journal of Vacuum Science & Technology A, 2023, 41 (6), pp.063003. ⟨10.1116/6.0002857⟩. ⟨hal-04299303⟩
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Nombre de documents
82
Nombre de notices
295
Mots-clés
Plasmas froids
Mott insulator
CaTiO3Pr^3^+
Calcined clay
AuCu alloy
Etching
Nanotubes
TEM
Rutile
Atomic layer etching
Titanium dioxide
Residual stress
Band alignment
B3 Solar cells
Biocapteurs
Alzheimer's disease
Anatase
B2 Semiconducting indium compounds
BOMBARDMENT
Aluminium nitride
Spectroscopic ellipsometry
Annealing
B2 Quaternary
Biomembranes
Ambipolar material
Ablation laser
Low-pressure plasma processing
Argon InP chlorine etching inductive coupled plasma ICP modeling plasma sheath simulation
Chalcogenide
Magnetron sputtering
Scanning electron microscopy
Optical waveguides
Optical interferometry
Amyloid precursor
Resistive switching
Applications industrielles
A Multilayers
XPS
Band gap
PECVD
X-ray diffraction
Films
Transfert d'énergie
Buffer Couple
Nanocomposite
Kirkendall effect
Mott insulators
A Thin films
A1 Characterization
Plasma etching
NEXAFS
B Chemical synthesis
Thin film
Physical vapor deposition
B2 Semiconducting alloys
Alloying
Capacitance
SF 6
Bixbyite
Integrated optics
Copper
3 nm in size
Carbon
Thin films
A Chalcogenides
AlN
Sol-gel
Semiconductors
Avalanche breakdown
Non-volatile memory
Oxides
Structure
AZO thin films
Biomasse
A-CNx
TiO2
A3 Physical vapor deposition processes
C Photoelectron spectroscopy
Transmission electron microscopy
X-ray photoelectron spectroscopy
Bipolar resistive switching BRS
Atomic force microscopy
Optical properties
CH4
Vanadium Sesquioxide
Functionalization
CHLORINE PLASMAS
CIGSe
Amorphous
Mass spectrometry
Carbon Nanotube
Colloidal solution
Adsorption
Aryl-diazonium salts
Selenization
CNTs’ collapse
Biofilms microbiens
Sputtering
B1 Inorganic compounds
V2O3